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March Plasma
The global leader in gas plasma cleaning technologie for Semiconductor, Wafer Level Packaging an dprinted Circuit Boards. March design and manufacture a complete line of plasma treatment systems.
Plasma cleaning is a universal applied environmentally process used in numerous manufacturing processes for removal of sub-micron contamination. Dry processing is advantageous in a wide variety of manufactuting operations for removal of many types of contamination including organic residues, polymer coatings or build-ups, waxes, metals and metal oxides, fluorine and other halogens.
The Semiconductor Business Group focuses on plasma processes for advanced semiconductor packaging and assembly (ASPA), wafer level packaging (WLP), microelectromechanical systems (MEMS), data storage devices such as film read-write heads (TFH) for hard disk drives, and images sensors.
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AP-1000 Plasma Systems
PLC controller with touch screen inter-
face provides industrial reliability and
ease of use. Complete systems enclo-
sure minimizes footprint.
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FlexTRAK Plasma System
The flexTRAK system offers high through-
put capability up to 480 substrates or
process carriers per hour. Its small chamber
volume and proprietary proces control enable
unmatched short cycle times, while its unique
slim structure minimizes floor space require-
ments.
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FlexTRAK-BH Plasma System
The FlexTRAK-BH system is designed
for high-throughput processing of micro-
electronic boards, trays, or other flat
device carriers, up to 2 boats per
plasma cycle.
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FlexTRAK-SH Plasma System
the universal architecture of the FlexTRAK-SH
system accomodates a wide range of strip sizes
in the same system, yielding unmatched
production flexibility.
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FlexTRAK-WR Plasma System
The FlexTRAK-BH system is designed
for high-throughput processing of semi-
conductor wafers up to 300mm (12 in.)
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XTRAK Plasma System
With process capability up to 180 substrates ot carriers per hour, the
systems's Smart Tune management systems provided closed-loop
control that reduces tuning to less than one second.
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PX-Series Plasma System
PX-Series systems are equipped
with an automatic impedance
matching network for ease of
operation and consistent results.
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Anisotropic RIE Plasma System
The CS-1701 system is excellent for
metal etching of III-V compounds,
anisotropic etching of nitrides,
oxides and polymides.
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PM-100 Plasma System
Designed to be a low-cost, highly effective
plasma treatment solution for treating electronic
components, printed circuit boards, and medical
& life science devices.
plasma cycle.
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Request documentation
FlexTRAK-BH Plasma System
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